gas dissociation meaning in English
气体离解
Examples
- This method takes into consideration the impact of high - temp gas dissociation and calculates with numerical value solution
该方法考虑了高温燃气解离的影响,利用数值解技术开展计算。 - By film thickness measured , fourier transformed infrared spectrometer ( ftir ) analysis , x - ray photoelectron spectroscopy ( xps ) analysis and relative irradiance measurement , the effect of microwave input powers on deposition rates , f / c ratios , bonding configurations of ct - c : f films and the radicals in plasma originating from source gases dissociation is analyzed
由于微波功率的改变会导致等离子体中电子温度和等离子体密度发生变化,从而造成不同的源气体分解过程,结果微波功率的升高导致了薄膜沉积速率的提高、 f / c比的降低,同时也导致薄膜中cf和cf _ 3基团密度的降低,而保持cf _ 2基团密度接近常数。